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Dr. Maria Faur
is the founder, owner,
and president of Special Materials Research and Technology (SPECMAT),
Inc. Dr.
Mircea Faur is the R&D VP.
SPECMAT
was incorporated
November of 1996
in the state of Ohio as a “for profit” S Corporation. It was
formed under a Reimbursable Space Act Agreement with NASA GRC for the
purpose of developing new wet chemical processing techniques for the
emerging advanced microelectronics and photonics (optoelectronics)
market.
Timeline of
Important Events
 1996 - SPECMAT,
Inc. starts the RTWCG SiOX process development.
1997 - 1999 - DARPA-NASA
award to SPECMAT, Inc. for RTWCG SiOX, Proof of Concept Demonstration:
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Task I: WCG SiOC
Thin Film Insulators for Si Solar Cell Applications;
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Task II: Low
Dielectric Constant WCG SiOF Insulators for VLSI Microelectronics;
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Task III: High
Dielectric Constant WCG SiOM Insulators for DRAM Applications;
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Task IV: WCG
SiO-Based Dielectrics on Si and III-V Compound Semiconductors for Space
Solar Cell Applications;
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Task V: RTWCG
of SiOX Dielectric Layers for LTPS TFT-FPD Applications;
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Task VI:
Feasibility Study of RTWCG of Si-O-C-N Gate Dielectric for Next
Generation CMOS Technology.
1999 - BMDO Phase I SBIR award to SPECMAT, Inc., RTWCG SiOX for
Microelectronics Applications.
2000 - BMDO Phase II SBIR "Room Temperature Wet Chemical Growth of
Low Dielectric Constant SiO-based Thin Films for ULSI Microelectronics"
award to SPECMAT, Inc., started in October.
2000 to 2002 - BMDO Phase II SBIR completed.
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